E-book PDF (8,48 Mb)
Consultabile solo con Adobe Acrobat Reader - software gratuito - (scopri come aprire i documenti)
Landis, Stefan

Lithography

2013 - ISTE

320 p.

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components. [Publisher's Text]

583782 characters.